Title :
A Bistable Pneumatic Microswitch For Driving Fluidic Components
Author :
Lisec, Thomas ; Kreutzer, Martin ; Wagner, Bernd
Keywords :
Biomembranes; Fabrication; Fluid flow; Fluidic microsystems; Microfluidics; Microswitches; Microvalves; Silicon; Switches; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721808
