Title :
A Silicon Microvalve With Integrated Flow Sensor
Author :
Franz, Jochen ; Baumann, Hdlmut ; Trah, Hans-Peter
Keywords :
Actuators; Biomembranes; Fabrication; Heating; Microvalves; Resistors; Silicon; Temperature sensors; Thermal sensors; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721809
