Title :
Novel pattern transfer technique on flexible polymer structure for advanced microfluidic systems
Author :
Kim, Janggil ; Takama, Nobuyuki ; Kim, Beomjoon
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
In this paper, a new pattern transfer technique into a flexible polymer structure is presented. Au and Cu micro patterns are transferred to a polydimethylsiloxane (PDMS) sheet through a lift-off method. Alkylsilane and alkanethiol SAMs are used for the surface modification to form an anti-adhesive layer or an adhesive layer, respectively. As a result, various types of Au and Cu patterns are transferred to a PDMS substrate successfully. The stability of the patterns on the PDMS sheet is confirmed by a simple scratch test of the surface. In addition, the experimental results under the various conditions will be shown.
Keywords :
copper; gold; microfluidics; monolayers; polymer structure; polymers; self-assembly; Au; Cu; PDMS sheet; adhesive layer; alkanethiol SAM; alkylsilane SAM; bio-MEMS; flexible polymer structure; lift off; microfluidic system; micropattern; pattern transfer; polydimethylsiloxane; scratch test; self-assembled monolayer; surface modification; Biological materials; Bonding forces; Fluidic microsystems; Gold; Microfluidics; Plastics industry; Polymers; Stability; Surface treatment; Testing;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497349
