Novel pattern transfer technique on flexible polymer structure for advanced microfluidic systems

Author

Kim, Janggil ; Takama, Nobuyuki ; Kim, Beomjoon

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

Volume

2

fYear

2005

Firstpage

1424

Abstract

In this paper, a new pattern transfer technique into a flexible polymer structure is presented. Au and Cu micro patterns are transferred to a polydimethylsiloxane (PDMS) sheet through a lift-off method. Alkylsilane and alkanethiol SAMs are used for the surface modification to form an anti-adhesive layer or an adhesive layer, respectively. As a result, various types of Au and Cu patterns are transferred to a PDMS substrate successfully. The stability of the patterns on the PDMS sheet is confirmed by a simple scratch test of the surface. In addition, the experimental results under the various conditions will be shown.

Keywords

copper; gold; microfluidics; monolayers; polymer structure; polymers; self-assembly; Au; Cu; PDMS sheet; adhesive layer; alkanethiol SAM; alkylsilane SAM; bio-MEMS; flexible polymer structure; lift off; microfluidic system; micropattern; pattern transfer; polydimethylsiloxane; scratch test; self-assembled monolayer; surface modification; Biological materials; Bonding forces; Fluidic microsystems; Gold; Microfluidics; Plastics industry; Polymers; Stability; Surface treatment; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497349

Filename

1497349