Title :
Determination of trap parameters in polyimide films by deep level transient spectroscopy
Author :
Liuf, D. ; Kao, K.C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Manitoba Univ., Winnipeg, Man., Canada
Abstract :
The capacitance of a metal-insulator-metal (MIM) system with a trapped space charge in the insulator has been derived under various conditions. On the basis of the transient behavior of the capacitance as a function of temperature, we have determined the trap parameters in polyimide films. In this paper we describe briefly the theory and present some experimental results
Keywords :
MIM structures; capacitance; deep level transient spectroscopy; insulating thin films; polymer films; space charge; capacitance; deep level transient spectroscopy; metal-insulator-metal system; polyimide film; space charge; trap parameters; Capacitance; Dielectrics and electrical insulation; Electron traps; Inorganic materials; Laboratories; Metal-insulator structures; Polyimides; Space charge; Spectroscopy; Temperature;
Conference_Titel :
Electrical Insulation, 1998. Conference Record of the 1998 IEEE International Symposium on
Conference_Location :
Arlington, VA
Print_ISBN :
0-7803-4927-X
DOI :
10.1109/ELINSL.1998.704698
