• DocumentCode
    1736561
  • Title

    Determination of trap parameters in polyimide films by deep level transient spectroscopy

  • Author

    Liuf, D. ; Kao, K.C.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Manitoba Univ., Winnipeg, Man., Canada
  • Volume
    1
  • fYear
    1998
  • Firstpage
    206
  • Abstract
    The capacitance of a metal-insulator-metal (MIM) system with a trapped space charge in the insulator has been derived under various conditions. On the basis of the transient behavior of the capacitance as a function of temperature, we have determined the trap parameters in polyimide films. In this paper we describe briefly the theory and present some experimental results
  • Keywords
    MIM structures; capacitance; deep level transient spectroscopy; insulating thin films; polymer films; space charge; capacitance; deep level transient spectroscopy; metal-insulator-metal system; polyimide film; space charge; trap parameters; Capacitance; Dielectrics and electrical insulation; Electron traps; Inorganic materials; Laboratories; Metal-insulator structures; Polyimides; Space charge; Spectroscopy; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Insulation, 1998. Conference Record of the 1998 IEEE International Symposium on
  • Conference_Location
    Arlington, VA
  • ISSN
    1089-084X
  • Print_ISBN
    0-7803-4927-X
  • Type

    conf

  • DOI
    10.1109/ELINSL.1998.704698
  • Filename
    704698