Title :
Electro-magnetically levitated micro-discs
Author :
Shearwood, C. ; Williams, C.B. ; Mellor, Phil H. ; Chang, K.Y. ; Woodhead, J.
Author_Institution :
Dept. of Electron. & Electr. Eng., Sheffield Univ.
fDate :
2/27/1996 12:00:00 AM
Abstract :
We describe the evolution of a radically new class of sensors, based upon the electromagnetic levitation of a micro-disc. These sensors are frictionless and so are expected to have an enhanced reliability and longer lifetime compared to conventional micro-machined sensors and actuators. In particular we report progress towards a tunable micro-cavity and micro-optical chopper
Keywords :
electromagnetic launchers; laser cavity resonators; laser tuning; magnetic levitation; optical sensors; reliability; semiconductor lasers; actuators; electro-magnetically levitated micro-discs; electromagnetic levitation; enhanced reliability; frictionless; longer lifetime; micro-machined sensors; micro-optical chopper; optical sensors; tunable micro-cavity;
Conference_Titel :
Microengineering Applications in Optoelectronics, IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19960241
