Title :
Backshooter - A New Smart Micromachined Single-chip Inkjet Printhead
Author :
Krause, P. ; Obermeier, E. ; Wehl, W.
Keywords :
Actuators; Anisotropic magnetoresistance; Biomembranes; CMOS process; CMOS technology; Etching; Heating; Micromachining; Solid state circuits; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721812
