Title :
Application of porous silicon technology to optical waveguiding
Author :
Loni, A. ; Bozeat, R.J. ; Krueger, M. ; Berger, M.G. ; Arens-Fischer, R. ; Thoenissen, M. ; Arrand, H.F. ; Benson, T.M.
Author_Institution :
Defence Res. Agency, Malvern, UK
fDate :
2/27/1996 12:00:00 AM
Abstract :
Porous silicon is a widely studied material which has significant potential for the realisation of monolithic, all-silicon optoelectronic integrated circuits. To maintain monolithicity, irrespective of the light source technology used, silicon-based optical waveguides will be required, these enabling light from the source to be routed and split to different points, on-chip or otherwise. Although a number of silicon-based waveguide technologies are available, the aim of the present study is to highlight the use of, and flexibility afforded by, porous silicon as a waveguide medium
Keywords :
VLSI; integrated optics; integrated optoelectronics; optical fabrication; optical waveguides; porous materials; silicon; Si; light source technology; monolithic all-silicon optoelectronic integrated circuits; monolithicity; on-chip; optical waveguiding; porous silicon; porous silicon technology; silicon-based optical waveguides; silicon-based waveguide technologies; waveguide medium;
Conference_Titel :
Microengineering Applications in Optoelectronics, IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19960243