Title :
Design, implementation and measurement of 26.6 GHz patch antenna using MEMS technology
Author :
Abdel-Aziz, M. ; Ghali, H. ; Ragaie, H. ; Haddara, H. ; Larique, E. ; Guillon, B. ; Pons, P.
Author_Institution :
Dept. of Electron. & Comput. Eng., Ain Shams Univ., Cairo, Egypt
Abstract :
The paper presents a 26.6 GHz patch antenna using MEMS technology. In this technology, the patch is suspended over a thin dielectric layer (membrane), which is deposited on a high index silicon substrate. In addition, the silicon substrate is fully etched under the patch, creating an air cavity region of very low dielectric constant (/spl epsiv//sub r//spl cong/1). The antenna is directly fed using a microstrip line, and a CPW-microstrip transition is used for probe measurements of the antenna return loss. The design is performed using the 3D electromagnetic simulator HFSS/sup /spl reg//. The measured antenna return loss is -17 dB at 26.6 GHz, and the bandwidth is 4.5%. The antenna has a radiation efficiency of 61.7% and directivity of 7.9 dB. The measured antenna cross-polarization level is less than -20 dB in both the E- and H-planes.
Keywords :
antenna feeds; electromagnetic wave polarisation; etching; micromachining; micromechanical devices; microstrip antennas; microstrip transitions; semiconductor device manufacture; silicon; -17 dB; 26.6 GHz; CPW-microstrip transition; MEMS technology; Si; air cavity region; antenna return loss; cross-polarization level; dielectric constant; dielectric membrane; directivity; high resistivity silicon substrate; microstrip line feed; patch antenna; radiation efficiency; thin dielectric layer; Antenna measurements; Dielectric loss measurement; Dielectric measurements; Dielectric substrates; Electromagnetic measurements; Loss measurement; Micromechanical devices; Microstrip antennas; Patch antennas; Silicon;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2003. IEEE
Conference_Location :
Columbus, OH, USA
Print_ISBN :
0-7803-7846-6
DOI :
10.1109/APS.2003.1217481
