Title :
A novel micro-injector using surface acoustic wave
Author :
Bae, Joonhyung ; Sato, Masato ; Kuwano, Hiroki
Author_Institution :
Graduate Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
This paper describes the fabrication and evaluation of a novel micro-injector using surface acoustic wave. It was confirmed that dyed water was successfully injected into the air with the help of surface acoustic wave (SAW), which was generated by aluminum inter-digital transducer (IDT) on the AT-cut quartz substrate. In our knowledge, this kind of micro-injector using SAW is considered as the first device for fluidic injection.
Keywords :
interdigital transducers; microactuators; microfluidics; quartz; surface acoustic wave devices; AT-cut quartz substrate; aluminum inter-digital transducer; dyed water; fluidic injection; micro-injector; microactuator; microfluidics; surface acoustic wave; Acoustic transducers; Acoustic waves; Aluminum; Artificial intelligence; Fabrication; Microinjection; Reservoirs; Silicon; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497379
