Title :
Timed Petri net models of cluster tools
Author_Institution :
Dept. of Comput. Sci., Memorial Univ. of Newfoundland, St. John´´s, Nfld., Canada
Abstract :
Timed Petri nets are used as models of cluster tools, representing not only the concurrent activities of different chambers, but also the durations of these activities. Structural analysis, based on net invariants, provides basic performance measures, such as throughput and cycle time. The results are obtained in symbolic form, so many specific alternatives can easily be compared without repeated analyses of the models
Keywords :
Petri nets; cluster tools; integrated circuit manufacture; production control; cluster tools; cycle time; integrated environmentally isolated manufacturing system; net invariants; structural analysis; throughput; timed Petri net models; Computer science; Orbital robotics; Performance analysis; Petri nets; Robot kinematics; Semiconductor device modeling; Space technology; Steady-state; Throughput; Transient analysis;
Conference_Titel :
Systems, Man, and Cybernetics, 2000 IEEE International Conference on
Conference_Location :
Nashville, TN
Print_ISBN :
0-7803-6583-6
DOI :
10.1109/ICSMC.2000.884468
