Silicon technology: from submicron dimensions to large areas

Summary form only given. The need for cheaper and faster logic and memory integrated circuits is a strong push in the development of silicon technology to enable smaller minimal dimensions on the chip. On the other hand, the silicon technology as used in micro-systems, high frequency semiconductors and large area devices such as TFT displays and solar cells is rather driven by factors such as the need for IC process compatibility, low temperature processing and less common materials. In this presentation, the technological challenges in the various areas are indicated and common trends identified. It is then shown that a combination of the different technologies leads to unique system solutions.