Title :
Soft recovery characteristics of punch-through power diodes by proton irradiation
Author :
Zhang, Changli ; Waldmeyer, Juerg ; Roggwiller, Peter ; Chen, Zhiming ; Lu, Yapeng
Author_Institution :
Xian Power Electron. Res. Inst., China
Abstract :
In this paper, we have experimentally compared the softness of reverse recovery characteristics of punch-through 1000 A/2000 V power alloyed diodes produced with different lifetime control techniques. It was found that the best softness factor could be obtained with a proton penetration depth of 220 μm, achieved with an irradiation energy of 5 MeV. For comparison, the effects of 5-12 MeV electron irradiation and platinum diffusion and some combinations were studied. The simulation results for proton irradiated device based on Silvaco Mixed-mode verification indicated in qualitative agreement with measurements
Keywords :
diffusion; electron beam effects; platinum; power semiconductor diodes; proton effects; 1000 A; 200 mum; 2000 V; 5 to 12 MeV; Pt; Silvaco Mixed-mode verification; irradiation energy; lifetime control techniques; platinum diffusion; power alloyed diodes; proton irradiation; proton penetration depth; punch-through power diodes; soft recovery characteristics; softness factor; Alloying; Annealing; Cathodes; Doping; Electron emission; Platinum; Power electronics; Protons; Semiconductor diodes; Voltage control;
Conference_Titel :
Power Electronics and Motion Control Conference, 2000. Proceedings. IPEMC 2000. The Third International
Conference_Location :
Beijing
Print_ISBN :
7-80003-464-X
DOI :
10.1109/IPEMC.2000.885362
