Title :
Dependence of annealing temperature on cluster formation during in situ growth of CNTs
Author :
Keyn, Martin ; Kramer, Andreas ; Schwalke, Udo
Author_Institution :
Inst. for Semicond. Technol. & Nanoelectron., Tech. Univ. Darmstadt, Darmstadt, Germany
Abstract :
In this work we use atomic force microscopy to investigate the influence of the annealing temperature on the formation of nano-clusters in our growth technique for carbon nanotubes. Cluster formation is carried out just before in situ growth of carbon nanotubes from a methane feedstock by means of catalytic chemical vapor deposition where the clusters act as the catalyst. Since cluster size and distribution are directly connected to diameter and amount of the grown carbon nanotubes, respectively, the cluster formation process is of great interest.
Keywords :
aluminium compounds; annealing; atomic force microscopy; carbon nanotubes; catalysis; catalysts; chemical vapour deposition; field effect transistors; nanofabrication; nickel; semiconductor nanotubes; AlxOy-C-Ni; FET; annealing temperature dependence; atomic force microscopy; carbon nanotube in situ growth; catalyst; catalytic chemical vapor deposition; cluster distribution; cluster size; field effect transistor; methane feedstock; nanocluster formation; semiconducting carbon nanotube; Annealing; Carbon nanotubes; Nickel; Plasmas; Pollution measurement; Silicon; Temperature measurement; annealing; atomic force microscopy; carbon nanotube field-effect transistor; carbon nanotubes; catalytic chemical vapor deposition; nano-cluster;
Conference_Titel :
Design & Technology of Integrated Systems In Nanoscale Era (DTIS), 2014 9th IEEE International Conference On
Conference_Location :
Santorini
DOI :
10.1109/DTIS.2014.6850652
