Title :
Accurate multiplexed test structure for threshold voltage matching evaluation
Author :
Welter, Loic ; Dreux, Philippe ; Innocenti, Jordan ; Aziza, H. ; Portal, J.-M.
Author_Institution :
STMicroelectron. Rousset, Rousset, France
Abstract :
This paper presents a multiplexed test structure able to measure a large number of transistor threshold voltages within a scribe line. To achieve this, switches are used to select a single transistor among others in a small multiplexed array. A study to evaluate the influence of this multiplexing system on electrical measurement is conducted. Post-layout simulations are presented to validate the concept for transistor matching characterization.
Keywords :
MOSFET; multiplexing; semiconductor device testing; semiconductor switches; MOS transistors; accurate multiplexed test structure; electrical measurement; metal oxide semiconductor transistors; post-layout simulations; scribe line; small multiplexed array; switches; threshold voltage matching evaluation; transistor matching characterization; transistor threshold voltages; Arrays; Current measurement; Electrical resistance measurement; Logic gates; MOSFET; multiplexed test structure; threshold voltage; transistor matching;
Conference_Titel :
Design & Technology of Integrated Systems In Nanoscale Era (DTIS), 2014 9th IEEE International Conference On
Conference_Location :
Santorini
DOI :
10.1109/DTIS.2014.6850657
