Title :
Tunable microwave SER on silicon membrane
Author :
Sajin, George ; Matei, Elena ; Marcelli, Romolo
Author_Institution :
Nat. Res. & Dev. Inst. for Microtechnol., Romania
Abstract :
This work presents performances of a tunable microwave straight edge resonator (SER) on a silicon membrane. The aim of this approach is to obtain a miniaturised MSW device, integrable in a planar microwave circuit. S11 and S21 parameters of this device are presented for various magnetic polarizing fields showing frequency tunability between approximately 4.2 GHz and 7.25 GHz. Using silicon membranes to support these devices offers important openings toward SER integration in MMIC
Keywords :
MMIC; magnetic microwave devices; magnetostatic wave devices; membranes; resonators; silicon; tuning; 4.2 to 7.25 GHz; MMIC; SHF; Si membrane; frequency tunability; integrable device; magnetic polarizing fields; miniaturised MSW device; planar microwave circuit; straight edge resonator; tunable microwave resonator; Biomembranes; Etching; Frequency; Magnetostatic waves; Microwave devices; Optical ring resonators; Q factor; Silicon; Transducers; Tunable circuits and devices;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.890227
