Title :
Thin- and thick-film structures for miniature biomedical sensors
Author :
Neuman, M.R. ; Lindner, E. ; Cristalli, A. ; Gyurcsanyi, R.E. ; Cheema, K. ; Pandolf, M.
Author_Institution :
Joint Program in Biomed. Eng., Memphis State Univ., TN, USA
Abstract :
Physical and chemical miniature biomedical sensors fan be fabricated using thin- and thick-film technology. Devices such as biopotential electrodes; temperature, force, and compliant strain gauge sensors; and ion-selective electrodes have been designed, constructed, and applied to biomedical problems. Sometimes there are advantages to depositing non-conventional materials, thicker films, and thin- thick-film hybrid structures in fabricating biomedical sensors
Keywords :
bioelectric potentials; biomedical electrodes; biomedical transducers; force measurement; microsensors; strain gauges; temperature sensors; thick film devices; thin film devices; biomedical sensors fabrication; biopotential electrodes; compliant strain gauge sensors; force sensors; ion-selective electrodes; miniature biomedical sensors; nonconventional materials deposition; thick-film structures; thin-film structures; Biological materials; Biomedical electrodes; Biomedical materials; Biosensors; Capacitive sensors; Chemical and biological sensors; Chemical sensors; Chemical technology; Force sensors; Temperature sensors;
Conference_Titel :
Microtechnologies in Medicine and Biology, 1st Annual International, Conference On. 2000
Conference_Location :
Lyon
Print_ISBN :
0-7803-6603-4
DOI :
10.1109/MMB.2000.893774
