Thin- and thick-film structures for miniature biomedical sensors

Author

Neuman, M.R. ; Lindner, E. ; Cristalli, A. ; Gyurcsanyi, R.E. ; Cheema, K. ; Pandolf, M.

Author_Institution

Joint Program in Biomed. Eng., Memphis State Univ., TN, USA

fYear

2000

fDate

2000

Firstpage

211

Lastpage

215

Abstract

Physical and chemical miniature biomedical sensors fan be fabricated using thin- and thick-film technology. Devices such as biopotential electrodes; temperature, force, and compliant strain gauge sensors; and ion-selective electrodes have been designed, constructed, and applied to biomedical problems. Sometimes there are advantages to depositing non-conventional materials, thicker films, and thin- thick-film hybrid structures in fabricating biomedical sensors

Keywords

bioelectric potentials; biomedical electrodes; biomedical transducers; force measurement; microsensors; strain gauges; temperature sensors; thick film devices; thin film devices; biomedical sensors fabrication; biopotential electrodes; compliant strain gauge sensors; force sensors; ion-selective electrodes; miniature biomedical sensors; nonconventional materials deposition; thick-film structures; thin-film structures; Biological materials; Biomedical electrodes; Biomedical materials; Biosensors; Capacitive sensors; Chemical and biological sensors; Chemical sensors; Chemical technology; Force sensors; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microtechnologies in Medicine and Biology, 1st Annual International, Conference On. 2000

Conference_Location

Lyon

Print_ISBN

0-7803-6603-4

Type

conf

DOI

10.1109/MMB.2000.893774

Filename

893774