Micromachined microphone with optical interferometric readout

Author

Degertekin, F. Levent ; Hall, Neal

Author_Institution

George W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Volume

3

fYear

2001

fDate

6-9 May 2001

Firstpage

177

Abstract

A self-calibrating micromachined microphone using an integrated optical displacement detection scheme is described. The microphone consists of a reflective vacuum-sealed membrane microfabricated over an optical diffraction grating on a transparent substrate, which can be electrostatically actuated. When illuminated through the substrate by a laser, this configuration forms a phase sensitive diffraction grating providing the sensitivity of an optical interferometer

Keywords

calibration; diffraction gratings; integrated optics; light interferometers; micromachining; microphones; microsensors; electrostatic actuation; integrated optical displacement detection; laser illumination; microfabrication; optical interferometric readout; phase sensitive diffraction grating; reflective vacuum-sealed membrane; self-calibrating micromachined microphone; transparent substrate; Biomembranes; Diffraction gratings; Displacement measurement; Microphones; Optical detectors; Optical diffraction; Optical interferometry; Optical resonators; Optical sensors; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2001. ISCAS 2001. The 2001 IEEE International Symposium on

Conference_Location

Sydney, NSW

Print_ISBN

0-7803-6685-9

Type

conf

DOI

10.1109/ISCAS.2001.921275

Filename

921275