Title :
Micromachined microphone with optical interferometric readout
Author :
Degertekin, F. Levent ; Hall, Neal
Author_Institution :
George W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
A self-calibrating micromachined microphone using an integrated optical displacement detection scheme is described. The microphone consists of a reflective vacuum-sealed membrane microfabricated over an optical diffraction grating on a transparent substrate, which can be electrostatically actuated. When illuminated through the substrate by a laser, this configuration forms a phase sensitive diffraction grating providing the sensitivity of an optical interferometer
Keywords :
calibration; diffraction gratings; integrated optics; light interferometers; micromachining; microphones; microsensors; electrostatic actuation; integrated optical displacement detection; laser illumination; microfabrication; optical interferometric readout; phase sensitive diffraction grating; reflective vacuum-sealed membrane; self-calibrating micromachined microphone; transparent substrate; Biomembranes; Diffraction gratings; Displacement measurement; Microphones; Optical detectors; Optical diffraction; Optical interferometry; Optical resonators; Optical sensors; Substrates;
Conference_Titel :
Circuits and Systems, 2001. ISCAS 2001. The 2001 IEEE International Symposium on
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-6685-9
DOI :
10.1109/ISCAS.2001.921275
