Title :
Heterogeneous integration of biomimetic acoustic microsystems
Author :
Andreou, Andreas G. ; Goldberg, David H. ; Culurciello, Eugenio ; Stanacevic, Milutin ; Cauwenberghs, Gert ; Riddle, Larry
Author_Institution :
Dept. of Electr. & Comput. Eng., Johns Hopkins Univ., Baltimore, MD, USA
Abstract :
We discuss biologically inspired devices and architectures for acoustic processing microsystems. We exploit state of the art integrated microsystems technologies to heterogeneously integrate electronics and micromechanical structures for acoustic sensing and signal processing
Keywords :
acoustic signal processing; biomimetics; microsensors; acoustic sensor; acoustic signal processor; biomimetic acoustic microsystem; heterogeneous integration; micromechanical structure; Acoustic devices; Acoustic sensors; Biology computing; Biomembranes; Biomimetics; Micromechanical devices; Sensor arrays; Sensor systems; Springs; Very large scale integration;
Conference_Titel :
Circuits and Systems, 2001. ISCAS 2001. The 2001 IEEE International Symposium on
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-6685-9
DOI :
10.1109/ISCAS.2001.921278
