Stress-migration analysis on SAW duplexer

Author

Ebata, Yasuo ; Koshino, Masayoshi ; Furukawa, Osamu ; Ichikawa, Satoshi

Author_Institution

Dept. of Device Eng., Toshiba DDC Co., Yokohama, Japan

Volume

1

fYear

2000

fDate

36800

Firstpage

5

Abstract

A SAW antenna duplexer (DPX) consists of a TX-filter, a RX-filter and a phase-shifter. They are demanded to be durable against 1.2 W of excitation power for several ten thousands hours. The filters, consisting of several parallel and series connected one-port resonators, contain high density SAW power and tend to deteriorate by the stress-migration of the aluminum electrodes. We analyzed the absolute values of each resonator-surface strain induced by resonant SAW energy using the numerical analysis method. Several facts are found that strains of aluminum film electrodes vary 2-3 times with driving frequency and that the connected condition of TX and RX filters through phase-shifter reduces resonators surface strains in RX filter for TX frequency band. Experimental life tests are also carried out. As a result, high textured Cu-doped aluminum on Ti film of SH-mode resonators on 36 Y-cut LiTaO3 proves to withstand for the 1.2 W driving power

Keywords

antenna accessories; phase shifters; stress analysis; surface acoustic wave resonator filters; 1.2 W; Al:Cu; Cu-doped aluminum electrode; LiTaO₃; LiTaO₃ substrate; RX filter; SAW antenna duplexer; SH-mode resonator; TX filter; Ti; Ti film; numerical analysis; phase shifter; stress migration; surface strain; Aluminum; Band pass filters; Capacitive sensors; Electrodes; Frequency; Phase shifters; Resonator filters; Surface acoustic waves; Virtual manufacturing; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2000 IEEE

Conference_Location

San Juan

ISSN

1051-0117

Print_ISBN

0-7803-6365-5

Type

conf

DOI

10.1109/ULTSYM.2000.922495

Filename

922495