SSBW to PSAW conversion in SAW devices using heavy mechanical loading

Author

Fusero, Y. ; Ballandras, S. ; Desbois, J. ; Hode, J.M. ; Ventura, P.

Author_Institution

Lab. de Phys. et Metrol. des Oscillateurs, CNRS, Besancon, France

Volume

1

fYear

2000

fDate

36800

Firstpage

163

Abstract

The development of efficient computation tools based on mixed analytical and numerical calculation approaches allows precise descriptions and characterizations of Surface Acoustic Wave (SAW) propagation. In this work, such a theoretical model is used to analyze the evolution of Pseudo Surface Acoustic Waves (PSAW) on standard YX Lithium Tantalate cuts versus Aluminum strip height. It is shown that the Surface Skimming Bulk Wave (SSBW) which accompanies the PSAW on such crystal orientations may be trapped by the grating, exhibiting a PSAW-like behavior when close to the Bragg condition. The consequences of this phenomenon are discussed

Keywords

aluminium; boundary integral equations; finite element analysis; lithium compounds; metallisation; periodic structures; surface acoustic wave devices; Al; Al strip height; Bragg condition; LiTaO₃; SAW devices; SAW propagation; SSBW to PSAW conversion; crystal orientation; grating; heavy mechanical loading; pseudo surface acoustic waves; standard YX LiTaO₃ cuts; surface acoustic wave propagation; surface skimming bulk wave; theoretical model; Acoustic propagation; Acoustic waves; Admittance; Electrodes; Frequency; Gratings; Lithium compounds; Strips; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2000 IEEE

Conference_Location

San Juan

ISSN

1051-0117

Print_ISBN

0-7803-6365-5

Type

conf

DOI

10.1109/ULTSYM.2000.922531

Filename

922531