Title :
Elementary surface acoustic wave effects studied by scanning acoustic force microscopy
Author :
Hesjedal, T. ; Behme, G.
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., CA, USA
Abstract :
Scanning Acoustic Force Microscopy (SAFM) has been used to study elementary surface acoustic wave phenomena with nanoscale spatial resolution. The SAFM technique is capable of detecting acoustic wave properties of arbitrarily polarized modes with sub-wavelength resolution and unmatched sensitivity. Elementary model systems like symmetric single finger wave sources and circular wave sources are studied for the first time in detail
Keywords :
acoustic microscopy; scanning probe microscopy; surface acoustic waves; SAFM; arbitrarily polarized modes; circular wave sources; elementary surface acoustic wave phenomena; nanoscale spatial resolution; scanning acoustic force microscopy; sensitivity; sub-wavelength resolution; symmetric single finger wave sources; Acoustic signal detection; Acoustic waves; Atomic force microscopy; Force measurement; Frequency; Optical surface waves; Probes; Sawing machines; Spatial resolution; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
Print_ISBN :
0-7803-6365-5
DOI :
10.1109/ULTSYM.2000.922544
