2.4 GHz SAW filters using AlN deposited on off-angle R-plane sapphire substrates by MOCVD

Author

Shibata, Tomohiko ; Hori, Yuji ; Asai, Keiichiro ; Nakamura, Yukinori ; Tanaka, Mitsuhiro ; Kaigawa, Kazuyuki ; Shibata, Junko ; Sakai, Hiroaki

Author_Institution

NGK Insulators Ltd., Nagoya, Japan

Volume

1

fYear

2000

fDate

36800

Firstpage

287

Abstract

A-plane AlN films deposited on off-angle R-plane sapphire substrates, in which a surface plane was tilted towards [1-101] sapphire direction, were shown to be effective in restraining the generation of inverted twins. Surface acoustic wave (SAW) filters at 2.4 GHz were reliably made using the optimized AlN on the off-angle sapphire substrate. 2.4 GHz spread spectrum (SS) signals were able to be directly demodulated to baseband data using the optimized front-end SAW matched filter (MF) and delay line (DL) on the AlN

Keywords

MOCVD coatings; UHF filters; aluminium compounds; matched filters; piezoelectric thin films; surface acoustic wave delay lines; surface acoustic wave filters; 2.4 GHz; A-plane AlN film; Al₂O₃; AlN; MOCVD; RF front-end; SAW delay line; SAW matched filter; off-angle R-plane sapphire substrate; spread spectrum signal; Baseband; Delay lines; Epitaxial growth; MOCVD; Matched filters; SAW filters; Spread spectrum communication; Substrates; Surface acoustic waves; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2000 IEEE

Conference_Location

San Juan

ISSN

1051-0117

Print_ISBN

0-7803-6365-5

Type

conf

DOI

10.1109/ULTSYM.2000.922558

Filename

922558