DLC films for SAW devices and novel self-aligning fabrication process

Author

Zhgoon, S.A. ; Revkov, A.M. ; Barinov, A.E. ; Zhang, Q. ; Yoon, S.F. ; Ahn, J. ; Rusli

Author_Institution

Moscow Power Eng. Inst., Russia

Volume

1

fYear

2000

fDate

36800

Firstpage

341

Abstract

A new process for fabrication of SAW devices is described. The process is based on deposition of diamond like carbon (DLC) film, patterning of the DLC film with opening windows for other materials deposition, new photoresist exposure from the backside of the substrate, deposition of several metals and other materials with rough shadow masks and final lift-off. The process uses only one single photomask and no precise alignments. A set of 90 degrees reflecting arrays with Al strips alternating DLC strips together with Au strips alternating DLC strips was prepared on a single substrate and the measurements of this sample are described and discussed

Keywords

carbon; surface acoustic wave devices; Al; Al strip; Au; Au strip; C; DLC strip; SAW device; diamond like carbon film; lift-off; photomask; photoresist; reflecting array; self-aligning fabrication; shadow mask; Adhesives; Costs; Diamond-like carbon; Fabrication; Gold; Inorganic materials; Organic materials; Piezoelectric films; Substrates; Surface acoustic wave devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2000 IEEE

Conference_Location

San Juan

ISSN

1051-0117

Print_ISBN

0-7803-6365-5

Type

conf

DOI

10.1109/ULTSYM.2000.922568

Filename

922568