Title :
Gas sensors based on SAW narrow aperture devices
Author :
Gulyaev, Yu.V. ; Kryshtal, R.G. ; Medved, A.V. ; Shemet, V.V. ; Zemlyakov, V.E.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Fryazino, Russia
Abstract :
A new configuration of surface acoustic wave (SAW) gas sensors based on SAW waveguide devices with relatively narrow aperture of several wavelengths is suggested. This suggested configuration permits to impart to SAW sensor a new feature such as a certain electronic tuning of chemical selectivity (without sensitive coating) by applying electric voltage between this waveguide and two planar electrodes closely placed on the substrate aside the waveguide. Furthermore due to rather narrow aperture it permits to improve sensor´s important characteristic such as threshold mass detectability. Sensors with this narrow waveguide configuration, by our opinion, are promising for application in modern gas analysis systems like electronic nose (E-nose) and portative chromatograph applications
Keywords :
gas sensors; surface acoustic wave sensors; surface acoustic wave waveguides; SAW waveguide; chemical selectivity; electronic nose; electronic tuning; gas analysis system; gas sensor; narrow aperture device; planar electrode; portable chromatograph; threshold mass detectability; Acoustic sensors; Acoustic waveguides; Acoustic waves; Apertures; Chemical sensors; Gas detectors; Planar waveguides; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
Print_ISBN :
0-7803-6365-5
DOI :
10.1109/ULTSYM.2000.922589
