• DocumentCode
    1745583
  • Title

    Parallel Monte Carlo simulation of ion implantation

  • Author

    Hössinger, Andreas ; Langer, Erasmus

  • Author_Institution
    Inst. for Microelectron., Tech. Univ. Wien, Austria
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    203
  • Lastpage
    208
  • Abstract
    An efficient parallelization method based on MPI (Message Passing Interface) for a Monte Carlo program for two-dimensional and three-dimensional simulation of ion implantations is presented. The method is based on a master-slave strategy where the master process synchronizes the slaves and performs the I/O-operations, while the slaves perform the physical simulation. For this method the simulation domain is geometrically distributed among several CPUs which have to exchange only very few information during the simulation. Thereby the communication overhead between the CPUs is kept so low that it has almost no influence on the performance gain even if a standard network of workstations is used instead of a massively parallel computer to perform the simulation. The performance gain has been optimized by identifying bottlenecks of this strategy when it is applied to arbitrary geometries consisting of various materials. For that reason different physical models within the simulation domain must be applied why it is impossible to determine a reasonable domain distribution before starting the simulation. Due to a feedback between master and slaves by on line performance measurements, we obtain an almost linear performance gain on a cluster of workstations with just slightly varying processor loads. Besides the increase in performance the parallelization method also achieves a distribution of the required memory. This allows three-dimensional simulations on a cluster of workstations, where each single machines would not have enough memory to perform the simulation on its own
  • Keywords
    Monte Carlo methods; ion implantation; semiconductor doping; Message Passing Interface; arbitrary geometries; bottlenecks; communication overhead; ion implantation; linear performance gain; master-slave strategy; parallel Monte Carlo simulation; parallelization method; performance gain; reasonable domain distribution; simulation domain; Communication standards; Computational modeling; Computer networks; Ion implantation; Master-slave; Message passing; Monte Carlo methods; Performance gain; Solid modeling; Workstations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ion Implantation Technology, 2000. Conference on
  • Conference_Location
    Alpbach
  • Print_ISBN
    0-7803-6462-7
  • Type

    conf

  • DOI
    10.1109/.2000.924125
  • Filename
    924125