DocumentCode
1745594
Title
Solid state pulsed power systems for plasma immersion ion implantation
Author
Gaudreau, Marcel P J ; Casey, J.A. ; Kempkes, M.A. ; Mulvaney, J.M. ; Hawkey, T.J.
Author_Institution
Diversified Technol., Bedford, MA, USA
fYear
2000
fDate
2000
Firstpage
496
Lastpage
499
Abstract
Diversified Technologies, Inc. (DTI) has developed and patented solid state technology to provide fast, high power switches capable of both opening and closing. These switches are modular, and can be combined in series and/or in parallel to provide a wide range of voltage, current, and power handling capabilities for plasma immersion ion implantation (PIII)
Keywords
ion implantation; plasma materials processing; pulsed power switches; DTI; Diversified Technologies, Inc.; high power modular switches; plasma immersion ion implantation; solid state pulsed power systems; solid state technology; Capacitance; Impedance; Plasma immersion ion implantation; Plasma sources; Pulse circuits; Pulse power systems; Solid state circuits; Switches; Switching circuits; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Ion Implantation Technology, 2000. Conference on
Conference_Location
Alpbach
Print_ISBN
0-7803-6462-7
Type
conf
DOI
10.1109/.2000.924196
Filename
924196
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