Title :
Solid state pulsed power systems for plasma immersion ion implantation
Author :
Gaudreau, Marcel P J ; Casey, J.A. ; Kempkes, M.A. ; Mulvaney, J.M. ; Hawkey, T.J.
Author_Institution :
Diversified Technol., Bedford, MA, USA
Abstract :
Diversified Technologies, Inc. (DTI) has developed and patented solid state technology to provide fast, high power switches capable of both opening and closing. These switches are modular, and can be combined in series and/or in parallel to provide a wide range of voltage, current, and power handling capabilities for plasma immersion ion implantation (PIII)
Keywords :
ion implantation; plasma materials processing; pulsed power switches; DTI; Diversified Technologies, Inc.; high power modular switches; plasma immersion ion implantation; solid state pulsed power systems; solid state technology; Capacitance; Impedance; Plasma immersion ion implantation; Plasma sources; Pulse circuits; Pulse power systems; Solid state circuits; Switches; Switching circuits; Voltage;
Conference_Titel :
Ion Implantation Technology, 2000. Conference on
Conference_Location :
Alpbach
Print_ISBN :
0-7803-6462-7
DOI :
10.1109/.2000.924196
