Title :
SbF3 as vaporizer feed material for the Bernas dual vaporizer in the VSEA E220/500 implanters
Author_Institution :
Varian Semicond. Equip. Assoc. Inc., Gloucester, MA, USA
Abstract :
Tests were carried out to determine the operating characteristics of the SbF3 vaporizer for the E220/500 Implanter. The rationale for the selection of SbF3 as the preferred vaporizer material is explained. The setup cup beam current and arc current vs. arc voltage characteristics for the temperature range of operation are given. These characteristics should serve to guide the selection of operating points. The recommended operating parameters are vaporizer temperatures between 135 and 160°C, arc voltages between 35 and 50 V, and arc currents around 1.0 A
Keywords :
antimony compounds; ion implantation; ion sources; vaporisation; 1.0 A; 135 to 160 degC; 35 to 50 V; Bernas dual vaporizer; SbF3; VSEA E220/500 implanters; arc current; arc voltage; cup beam current; vaporizer feed material; vaporizer temperature; Doping; Feeds; Implants; Oxidation; Semiconductor device testing; Semiconductor materials; Semiconductor process modeling; Silicon; Temperature distribution; Voltage;
Conference_Titel :
Ion Implantation Technology, 2000. Conference on
Conference_Location :
Alpbach
Print_ISBN :
0-7803-6462-7
DOI :
10.1109/.2000.924209
