Title :
Investigation of single mode fiber coupling using diffractive optical element with continuous relief fabricated by focused ion beam technology
Author :
Yongqi Fu ; Ngoi Kok ; Bryan, A.
Author_Institution :
Precision Eng. Lab., Nanyang Technol. Univ., Singapore
Abstract :
The design, microfabrication and testing of diffractive optical elements (DOE´s) with continuous relief and their use in fiber coupling, is discussed in detail. DOE´s with diameter as small as 65 /spl mu/m are realized by means of focused ion beam (FIB) technology. A focused Ga/sup +/ ion beam is used to mill a continuous relief microstructure at an acceleration voltage of 50 kV. From the results of the test, a coupling efficiency of 75% was achieved. This indicates that the DOE´s were suitably designed within the application requirements and satisfactorily manufactured by using FIB.
Keywords :
diffractive optical elements; focused ion beam technology; integrated optics; microlenses; micromachining; optical communication equipment; optical design techniques; optical fabrication; optical fibre couplers; optical testing; semiconductor lasers; 50 kV; 65 micron; 75 percent; Ga/sup +/; acceleration voltage; continuous relief; continuous relief microstructure; coupling efficiency; diffractive optical element; focused ion beam technology; microfabrication; optical design; optical fabrication; single mode fiber coupling; Acceleration; Ion beams; Microstructure; Milling machines; Optical coupling; Optical design; Optical diffraction; Optical fiber testing; Particle beam optics; Voltage;
Conference_Titel :
Optical Fiber Communication Conference and Exhibit, 2001. OFC 2001
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-655-9
