• DocumentCode
    1746532
  • Title

    MEMS electrostatic actuators for optical switching applications

  • Author

    Grade, J.D. ; Jerman, H.

  • Author_Institution
    Iolon Inc, San Jose, CA, USA
  • Volume
    3
  • fYear
    2001
  • fDate
    17-22 March 2001
  • Abstract
    Electrostatic actuators providing linear and angular deflection have been developed using deep reactive ion etching (DRIE). Optical switches with 0.5 dB loss at 1550 nm have been made showing switching times less than 5 ms.
  • Keywords
    electrostatic actuators; micro-optics; optical communication equipment; optical switches; sputter etching; 0.5 dB; 1550 nm; 5 ms; MEMS electrostatic actuators; angular deflection; deep reactive ion etching; linear deflection; optical switches; optical switching applications; switching times; Electrostatic actuators; Etching; Hydraulic actuators; Micromechanical devices; Optical attenuators; Optical beams; Optical collimators; Optical fibers; Optical filters; Optical switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication Conference and Exhibit, 2001. OFC 2001
  • Conference_Location
    Anaheim, CA, USA
  • Print_ISBN
    1-55752-655-9
  • Type

    conf

  • Filename
    928421
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1746532