Title :
Optical filter responses of InGaAsP microdisk resonators fabricated by polymer wafer bonding
Author :
Yong Ma ; Chang, G. ; Seongsik Chang ; Seng Tiong Ho
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Northwestern Univ., Evanston, IL, USA
Abstract :
Optical filters based on InGaAsP microdisk resonators with 10 /spl mu/m and 5 /spl mu/m diameters have been fabricated using a polymer wafer bonding process. A narrow linewidth of 0.22 nm and large free spectral range of 38 nm near 1.55 /spl mu/m are obtained. These devices are potentially useful as wavelength add-drop filters in DWDM networks.
Keywords :
III-V semiconductors; gallium arsenide; indium compounds; micro-optics; optical communication equipment; optical fabrication; optical filters; optical resonators; wafer bonding; wavelength division multiplexing; 0.22 nm; 1.55 micron; 10 micron; 5 micron; DWDM networks; InGaAsP; InGaAsP microdisk resonators; large free spectral range; narrow linewidth; optical filter responses; polymer wafer bonding; wavelength add-drop filters; Optical coupling; Optical filters; Optical polymers; Optical resonators; Optical scattering; Optical waveguides; Resonance; Resonator filters; Substrates; Wafer bonding;
Conference_Titel :
Optical Fiber Communication Conference and Exhibit, 2001. OFC 2001
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-655-9
