Title :
Flexible inserter for IC testing based on force control
Author :
Kawaji, Shigeyasu ; Ozaki, Fuminori ; Higashi, Ryutaro ; Taguchi, Tomohiro ; Yamakawa, Noboru ; Shimamura, Jumpei ; Arao, Masaki
Author_Institution :
Kumamoto Univ., Japan
Abstract :
In assembly lines in industrial fields, the construction of advanced manufacturing system which could autonomously adapt to various process variations is desired. For this, it is necessary to accomplish a breakthrough in bringing “force control” techniques into use for the practical applications. In this paper, a case of solving the problem is reported which conventional position control is used to hold the inserter for IC testing in the semiconductor manufacturing process, by developing the high-speed sensorless force control technology
Keywords :
automatic test equipment; force control; integrated circuit testing; process control; IC testing; advanced manufacturing system; assembly lines; flexible inserter; force control; high-speed sensorless force control technology; semiconductor manufacturing process; Assembly systems; Construction industry; Electrical equipment industry; Force control; High speed integrated circuits; Integrated circuit testing; Manufacturing industries; Manufacturing systems; Position control; Sensorless control;
Conference_Titel :
Assembly and Task Planning, 2001, Proceedings of the IEEE International Symposium on
Conference_Location :
Fukuoka
Print_ISBN :
0-7803-7004-X
DOI :
10.1109/ISATP.2001.929080
