Mechanical micro-dissection by microknife using ultrasonic vibration and ultra fine touch probe sensor

Recently, micromanipulation for bio-engineering has been developed. The purpose of this research is to develop the minute size knife for the cutting of the minute object such as the cell. In this paper, we report on the microknife that cuts off the object by using ultrasonic vibration of the sharp needle. We applied the multilayer piezoelectric actuator for generating the ultrasonic vibration for cutting. We developed the touch probe sensor for microknife by the PZT thin film which is made by the hydrothermal method. We evaluated the performance of cutting and the touch probe sensor by experiments.