Development of a scaled teleoperation system for nano scale interaction and manipulation

Author

Sitti, Metin ; Aruk, Baris ; Shintani, Hiroaki ; Hashimoto, Hideki

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

Volume

1

fYear

2001

fDate

2001

Firstpage

860

Abstract

A human-machine interface is proposed for teleoperated nano scale object interaction and manipulation. Design specifications for a bilateral scaled teleoperation system with slave and master robots, sensors, actuators, and control are discussed. Phantom and home-made haptic devices are utilized as the master manipulator, and a piezoresistive MEMS fabricated probe is selected as the slave manipulator, and topology and force sensor. A force reflecting servo type teleoperation control is chosen, and initial experiments are realized for interacting with silicon surfaces and nano structures. It is shown that fine structures can be felt on the operator´s finger successfully.

Keywords

atomic force microscopy; force sensors; haptic interfaces; microactuators; micromanipulators; nanotechnology; piezoelectric actuators; robot vision; servomechanisms; telerobotics; fine structures; force reflecting servo type teleoperation control; haptic devices; human-machine interface; master robot; nano scale interaction; nano scale manipulation; nano structures; piezoresistive MEMS fabricated probe; scaled teleoperation system; silicon surfaces; slave robot; Actuators; Control systems; Force sensors; Haptic interfaces; Imaging phantoms; Man machine systems; Manipulators; Master-slave; Robot sensing systems; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation, 2001. Proceedings 2001 ICRA. IEEE International Conference on

ISSN

1050-4729

Print_ISBN

0-7803-6576-3

Type

conf

DOI

10.1109/ROBOT.2001.932658

Filename

932658