Development of a micro transfer arm for a microfactory

A microfactory is a new concept for an extremely miniaturized manufacturing facility that enables dramatic space and energy conservation. As a material transfer and assembly component of a prototype microfactory, a micro transfer arm that provides 4-DOF and a maximum length of approximately 100 mm has been developed. To achieve a compact-lightweight structure, large workspace and high positioning accuracy, the arm is configured as a combination of a SCARA-type manipulator and a parallel mechanism. To enable the arm to perform fine assembly tasks, a 3-axis device with an integrated passive compliance device and force sensor was developed. In this paper the mechanical design of the arm structure and the fabrication process of the device are described, followed by an experimental evaluation for the arm and device.