Title :
Is micromachining still a dream or an industrial reality?
Author_Institution :
STMicroelectron., Cornaredo, Italy
Abstract :
This paper discusses the emerging MEMS technologies that address the problems of industrial scale application, examining aspects such as developing processes suitable for multiple applications, new methods of packaging and issues concerning reliability
Keywords :
electrostatic actuators; electrostatic motors; mechatronics; micromachining; packaging; reliability; emerging MEMS technologies; industrial scale application; micromachining; packaging; reliability; Accelerometers; CMOS technology; Circuits; Etching; Microelectromechanical devices; Micromachining; Micromechanical devices; Packaging; Plastics; Silicon;
Conference_Titel :
Advanced Intelligent Mechatronics, 2001. Proceedings. 2001 IEEE/ASME International Conference on
Conference_Location :
Como
Print_ISBN :
0-7803-6736-7
DOI :
10.1109/AIM.2001.936421
