Title :
Influence of dielectrical layer thickness in gage factor of pressure sensor
Author :
Tanyushin, Eugene Yu ; Gridchin, Victor A.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., NSTU, Novosibirsk, Russia
Abstract :
The dependence of gage factor on single-line sizes of resistors and thickness of dielectrical layer has been explored. Transfer constant of deformation from the substrate to resistive-strain sensor through dielectrical layer has been calculated
Keywords :
pressure sensors; strain sensors; deformation transfer constant; dielectric layer thickness; gauge factor; pressure sensor; resistor size; strain sensor; Biomembranes; Circuits; Dielectric substrates; Dielectrics and electrical insulation; Gas detectors; Mechanical sensors; Resistors; Silicon compounds; Temperature distribution; Temperature sensors;
Conference_Titel :
Electron Devices and Materials, 2001. Proceedings. 2nd Annual Siberian Russian Student Workshop on
Conference_Location :
Erlagol, Altai
Print_ISBN :
5-7782-0347-0
DOI :
10.1109/SREDM.2001.939135
