Title :
Theoretical basis of silicon integrated flowmeter designing for small gas flow
Author :
Kolchuzhin, Vladimir A. ; Seltz, Valery V. ; Shaporin, Alexey V.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., NSTU, Novosibirsk, Russia
Abstract :
The article presents a silicon integrated flowmeter designed for small gas flows, based on the measurement of a difference of pressure arising at a constriction in a pipeline. The sensitive element of the transducer is a piezoresistive bridge circuit made by planar technology
Keywords :
bridge circuits; elemental semiconductors; flowmeters; microsensors; piezoresistive devices; silicon; Si; piezoresistive bridge circuit; pipeline constriction; planar technology; pressure differential; silicon integrated flowmeter; small gas flow measurement; transducer; Fluid flow; Fluid flow measurement; Pipelines; Pollution measurement; Pressure measurement; Semiconductor devices; Signal processing; Silicon; Time measurement; Ultrasonic variables measurement;
Conference_Titel :
Electron Devices and Materials, 2001. Proceedings. 2nd Annual Siberian Russian Student Workshop on
Conference_Location :
Erlagol, Altai
Print_ISBN :
5-7782-0347-0
DOI :
10.1109/SREDM.2001.939137
