Title :
Plasma diagnostics for technological complex optimisation
Author :
Geller, Vladimir M. ; Gorban, Sergey N. ; Khrustalev, Vladimir A. ; Chipumov, S.A.
Author_Institution :
Dept. of Electron Devices, NSTU, Novosibirsk, Russia
Abstract :
Wide use in modem instrument making of RF and microwave plasma technological complexes (PTC) and dynamics of tariffs on the primary electric power put questions of power resources saving and increase of the efficiency. Marked circumstances compel us to formulate questions of PTC diagnostics again
Keywords :
plasma diagnostics; RF instrument; efficiency; microwave instrument; plasma diagnostics; plasma technological complex optimisation; power resources; Inductors; Microwave devices; Microwave technology; Plasma density; Plasma diagnostics; Plasma temperature; Power generation; Radio frequency; Resonance; Student members;
Conference_Titel :
Electron Devices and Materials, 2001. Proceedings. 2nd Annual Siberian Russian Student Workshop on
Conference_Location :
Erlagol, Altai
Print_ISBN :
5-7782-0347-0
DOI :
10.1109/SREDM.2001.939144
