Title :
Effects of organic binders on field emission properties in patterned carbon nanotube pixels
Author :
Cho, Young-Rae ; Lee, Jin Ho ; Ahn, Seong-Deok ; Kim, Bong-Chul ; Song, Yoon-Ho ; Hwang, Chi-Sun ; Chung, Choong Heui ; Cho, Kyoung Ik
Author_Institution :
Micro-Electron. Technol. Lab., Electron. Telecommun. Res. Inst., Taejon, South Korea
Abstract :
We fabricated field emitter arrays on thin-metal electrodes by using carbon nanotube (CNT). The turn-on fields of CNT emitters patterned by photolithography and lift-off process were 4.2 V/μm and 2.2 V/μm, respectively. The lower turn-on field for the latter was due to the thinner residue covering the surface of CNT emitters after final heat treatment
Keywords :
carbon nanotubes; electron field emission; heat treatment; photolithography; vacuum microelectronics; C; carbon nanotube pixels; field emission; field emitter array; heat treatment; lift-off process; organic binder; patterning process; photolithography; surface residue; thin metal electrode; turn-on field; Carbon nanotubes; Cathodes; Chromium; Coatings; Electrodes; Heat treatment; Lithography; Pixel; Scanning electron microscopy; Slurries;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939656
