Title :
Field emitter array image sensor with HARP target
Author :
Egami, N. ; Nanba, M. ; Osada, K. ; Takiguchi, Y. ; Okazaki, S. ; Yamagishi, T. ; Tanioka, K. ; Tanaka, M. ; Itoh, S.
Author_Institution :
NHK Sci. & Tech. Res. Labs, Tokyo, Japan
Abstract :
A new type of flat image sensor, consisting of an FEA (field emitter array) and a high sensitive photoconductive film, is proposed. An experimental sensor, which has 128 × 96 pixels, was fabricated and tested. Experimental results showed that the sensor could take two-dimensional images, demonstrating its potential as a next-generation image sensor
Keywords :
electron field emission; image sensors; photoconducting materials; vacuum microelectronics; 128 pixel; 96 pixel; HARP target; field emitter array; flat image sensor; photoconductive film; two-dimensional imaging; Cameras; Electrodes; Electron emission; Field emitter arrays; Image sensors; Photoconductivity; Prototypes; Sensor arrays; Sensor phenomena and characterization; Testing;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939702
