A new combinatorial process to fabricate PZT thin film from chemical sauces

Author

He, Gang ; Iijima, Takashi ; Funakubo, Hiroshi ; Wang, Zheng ; Sanada, Norio

Author_Institution

Tohoku Nat. Ind. Res. Inst., Japan

Volume

1

fYear

2000

fDate

2000

Firstpage

413

Abstract

In order to develop a new combinatorial synthesis method for the fabrication of sol-gel-derived PZT thin films, PZ (Pb and Zr) and PT (Pb and Ti) organic chemical sauces were spin-coated onto a substrate layer-by-layer in the sequences of PZ/PT or PT/PZ. To homogenize the multi layer-by-layer films, post-annealing was carried at 400 to 600°C for 2 to 14 days. Characterization of the samples was performed by XRD, SEM, and P-E hysteresis measurement. Homogenized PZT thin films with good ferroelectric property were obtained from the PZ and PT multi layer-by-layer films. It is concluded that it is possible to study the other kind of thin film materials by using this combinatorial synthesis method

Keywords

X-ray diffraction; annealing; dielectric hysteresis; ferroelectric thin films; lead compounds; scanning electron microscopy; sol-gel processing; spin coating; 2 to 14 day; 400 to 600 C; SEM; XRD; combinatorial synthesis method; ferroelectric property; homogenized thin films; hysteresis; multi layer-by-layer films; organic chemical sauces; post-annealing; sol-gel-derived thin films; spin-coated; Fabrication; Ferroelectric films; Ferroelectric materials; Hysteresis; Organic chemicals; Performance evaluation; Substrates; Transistors; X-ray scattering; Zirconium;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on

Conference_Location

Honolulu, HI

ISSN

1099-4734

Print_ISBN

0-7803-5940-2

Type

conf

DOI

10.1109/ISAF.2000.941584

Filename

941584