• DocumentCode
    1750036
  • Title

    Dynamic properties of PZT thick films structured on Si membrane by the aerosol deposition method

  • Author

    Lebedev, M. ; Akedo, J. ; Akiyama, Y.

  • Author_Institution
    Mech. Eng. Lab., AIST, Ibaraki, Japan
  • Volume
    1
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    455
  • Abstract
    The results of the direct deposition of lead zirconate titanate [Pb(Zr0.52Ti0.48)O3] (PZT) thick film on a Si based structure are presented. The dynamic actuation properties of PZT on the Si membrane were investigated. For a 7.5 × 7.5 mm 2, 170-μm-thick Si membrane driven by a 4.7 × 4.3 mm 2, 40-μm-thick PZT layer, the deflection and pumping force, which were 1.6 μm and 6.5 kPa, respectively, upon applying 100 V at nonresonance frequency 100 Hz were measured
  • Keywords
    aerosols; lead compounds; membranes; microactuators; micropumps; piezoceramics; piezoelectric actuators; thick films; 100 Hz; 100 V; MEMS technology; PZT; PZT thick film; PbZrO3TiO3; Si; Si membrane; aerosol deposition method; deflection; dynamic actuation; piezoceramic; pumping force; Aerodynamics; Aerosols; Biomembranes; Force measurement; Piezoelectric films; Plasma temperature; Semiconductor films; Sputter etching; Substrates; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
  • Conference_Location
    Honolulu, HI
  • ISSN
    1099-4734
  • Print_ISBN
    0-7803-5940-2
  • Type

    conf

  • DOI
    10.1109/ISAF.2000.941595
  • Filename
    941595
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1750036