Line-Structure Parameters Measurement of Single-Crystal-Silicon Step Based on Multi-scale Analysis

To detect side edges of single-crystal-silicon step scanned by AFM, the measurement data of the step are analyzed using wavelet theory. After the texture in different scale of image is detected, which have the character of multi-scale resolution and multi-orientational sub-image, the side edges of the step are reconstructed according to the character of AFM. Then the line-structure parameters of the step are calculated respectively based on analyzing the detected edge character, such as line-width, line-width roughness and line edge roughness. Since multi-scale analysis supports that lager-scale sub-image approaches original image and smaller-scale sub-image gives more details of original one, it has more potential in the exact parameters research of step topography