Thermo-sensitive Quartz Resonator Based on Tuning Fork Technology

Author

Xu, Jun ; Ai, Hong ; You, Bo ; Li, Xin

Author_Institution

Coll. of Autom., Harbin Univ. of Sci. & Technol.

Volume

1

fYear

0

fDate

0-0 0

Firstpage

5049

Lastpage

5053

Abstract

A novel high-performance sensor technology for measuring and monitoring temperature is described. This type of temperature sensor using a quartz tuning fork resonator is inherently insensitive to noise because the output is a frequency shift cause by an external temperature. The output can easily be converted into a digital signal and directly connected to a microcontroller without an A-D converter. Fabrication process for quartz tuning forks is realized by employing photolithography and selective etching a method. The operation of a thermo-sensitive quartz tuning-fork resonator and the frequency shift caused by an external temperature has been explained. The temperature sensor is designed with a doubly rotated cut show nearly a linear response with sensitivity about 70ppm/degree within temperature range from -50 degree to 200 degree, the numerical and experimental samples all indicated accuracies of 0.05 degree and a reasonable response time

Keywords

crystal resonators; photolithography; temperature sensors; vibrations; -50 to 200 C; frequency shift; photolithography; quartz tuning fork fabrication; selective etching; sensor technology; temperature measurement; temperature monitoring; temperature sensor; thermo-sensitive quartz resonator; thermo-sensitive quartz tuning fork resonator; tuning fork technology; Etching; Fabrication; Lithography; Microcontrollers; Resonant frequency; Sensor phenomena and characterization; Temperature distribution; Temperature measurement; Temperature sensors; Vibrations; Etching method; Quartz resonator; Temperature sensor; Tuning fork;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control and Automation, 2006. WCICA 2006. The Sixth World Congress on

Conference_Location

Dalian

Print_ISBN

1-4244-0332-4

Type

conf

DOI

10.1109/WCICA.2006.1713350

Filename

1713350