Title :
Thermo-sensitive Quartz Resonator Based on Tuning Fork Technology
Author :
Xu, Jun ; Ai, Hong ; You, Bo ; Li, Xin
Author_Institution :
Coll. of Autom., Harbin Univ. of Sci. & Technol.
Abstract :
A novel high-performance sensor technology for measuring and monitoring temperature is described. This type of temperature sensor using a quartz tuning fork resonator is inherently insensitive to noise because the output is a frequency shift cause by an external temperature. The output can easily be converted into a digital signal and directly connected to a microcontroller without an A-D converter. Fabrication process for quartz tuning forks is realized by employing photolithography and selective etching a method. The operation of a thermo-sensitive quartz tuning-fork resonator and the frequency shift caused by an external temperature has been explained. The temperature sensor is designed with a doubly rotated cut show nearly a linear response with sensitivity about 70ppm/degree within temperature range from -50 degree to 200 degree, the numerical and experimental samples all indicated accuracies of 0.05 degree and a reasonable response time
Keywords :
crystal resonators; photolithography; temperature sensors; vibrations; -50 to 200 C; frequency shift; photolithography; quartz tuning fork fabrication; selective etching; sensor technology; temperature measurement; temperature monitoring; temperature sensor; thermo-sensitive quartz resonator; thermo-sensitive quartz tuning fork resonator; tuning fork technology; Etching; Fabrication; Lithography; Microcontrollers; Resonant frequency; Sensor phenomena and characterization; Temperature distribution; Temperature measurement; Temperature sensors; Vibrations; Etching method; Quartz resonator; Temperature sensor; Tuning fork;
Conference_Titel :
Intelligent Control and Automation, 2006. WCICA 2006. The Sixth World Congress on
Conference_Location :
Dalian
Print_ISBN :
1-4244-0332-4
DOI :
10.1109/WCICA.2006.1713350
