Title :
The Key Role of Flexible, Low-Cost, Maskless Lithography in Nanoscale Science and Engineering
Author_Institution :
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts
Keywords :
Assembly; Costs; Electronics industry; Lithography; Nanoparticles; Self-assembly; Spatial resolution; Technological innovation;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247550
