Title :
Growth of Horizontally Aligned One-Dimensional Carbon Nanotubes Array on a Si Substrate
Author :
Zhang, Hongguo ; Chen, Zhi ; Li, Tianxiang ; Wang, Fengjuan ; Saito, Kozo
Author_Institution :
Department of Electrical and Computer Engineering and Center for Nanoscale Science and Engineering, University of Kentucky, Lexington, KY 40506, USA
Abstract :
A one-dimensional (1-D) array of carbon nanotubes horizontally aligned on silicon substrates was successfully grown using a flame synthesis method based on the template of a one-dimensional anodic aluminum oxide nanopore array. The diameter and length of nanotubes are controlled by the geometry of nanopores of the aluminum oxide template. This one-dimensional carbon nanotube array may have great potential for fabrication of nanoelectronic devices and nano-electromechanic systems (NEMS) compatible with the planar processing technology.
Keywords :
Aluminum oxide; Carbon nanotubes; Control system synthesis; Fabrication; Fires; Geometry; Nanoelectromechanical systems; Nanoporous materials; Nanoscale devices; Silicon;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247611
