Realization of a carbon nanotube-based triode

Author

Brunetti, F. ; Lugli, P. ; Fiori, A. ; Orlanducci, S. ; Sessa, V. ; Tamburri, E. ; Toschi, F. ; Terranova, M.L. ; Riccitelli, R. ; Petrolati, E. ; von Neumann, L. ; Paoloni, C. ; Reale, A. ; Di Carlo, A. ; Ciorba, A. ; Cirillo, M. ; Merlo, V.

Author_Institution

Institute for Nanoelectronic, Technical University of Munich, München, Germany

Volume

1

fYear

2006

fDate

17-20 June 2006

Firstpage

246

Lastpage

249

Abstract

We report the design and realization of a carbon nanotube-based integrated triode. Patterned Si/SiO2/Nb/Nb2O5multilayer was successfully realized by means of a photolithographic process. Such structure constitutes the patterned substrate of the successive Hot Filament Chemical Vapour Deposition (HFCVD) process. Selective growth of highly oriented SWCNT arrays was obtained in the predefined locations while survival of the entire structure was achieved. Field emission measurements of such materials were carried out both on a diode and in a triode configuration. Good and reproducible field emission behaviour has been observed in several realized structures. In order to validate the experimental data a first simulation of the behaviour of the integrated vacuum triode with a single field emission CNT was also simulated.

Keywords

chemical vapour deposition; field emission; single wall carbon nanotubes; triode; vacuum tube devices; Carbon nanotubes; Cathodes; Chemical vapor deposition; Diodes; Electron tubes; Materials science and technology; Niobium compounds; Physics; Temperature; Thermal conductivity; chemical vapour deposition; field emission; single wall carbon nanotubes; triode; vacuum tube devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on

Print_ISBN

1-4244-0077-5

Type

conf

DOI

10.1109/NANO.2006.247620

Filename

1717070