Title :
Temperature-dependent Characteristics of Carbon Nanofiber Arrays
Author :
Ngo, Quoc ; Ominami, Yusuke ; Cassell, Alan M. ; Li, Jun ; Meyyappan, M. ; Yang, Cary Y.
Author_Institution :
Center for Nanostructures, Santa Clara University, Santa Clara, California USA, 95050; Center for Nanotechnology, NASA Ames Research Center, Moffett Field, California USA, 94035
Abstract :
In this work, we present temperature-dependent electrical characteristics of vertically aligned carbon nanofiber (CNF) arrays for on-chip interconnect applications. The study consists of two parts. First, the electron transport mechanisms in these structures are investigated using low-temperature (∼4K-300K) I-V measurements. The measured resistivity in CNF arrays are modeled based on known graphite a-axis (parallel to basal plane) and c-axis (perpendicular to basal plane) electron conduction mechanisms. The model is verified using high-resolution scanning transmission electron microscopy (STEM) of the CNF-metal interface. Second, electrical reliability measurements are performed at different temperatures to demonstrate the robust nature of CNFs for interconnect applications. Finally, some guidance is presented in catalyst material selection to yield lower resistance CNFs.
Keywords :
carbon nanofiber; interconnect; Conducting materials; Conductivity; Electric variables; Electric variables measurement; Electrical resistance measurement; Performance evaluation; Robustness; Scanning electron microscopy; Temperature; Transmission electron microscopy; carbon nanofiber; interconnect;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247628
