Title :
Optimization of Grating Coupler Efficiency for Nanophotonic Device Integration
Author :
Masturzo, Scoft A. ; Rice, Jan M Yarrison ; Jackson, Howard E. ; Boyd, Joseph T.
Author_Institution :
Department of Electrical & Computer Engineering and Computer Science, University of Cincinnati, Cincinnati, OH 45221
Abstract :
A unique experimental apparatus has been developed for the optical characterization of nanophotonic devices. Grating couplers with nanoscale periodicity have been fabricated on silicon-on-insulator (SOI) substrates by electron beam lithography (EBL) and reactive ion etching (RIE). The coupling efficiency of these gratings has been measured as a function of grating depth and the angle and wavelength of incident radiation. A coupling efficiency of at least 5.2% is demonstrated for 1568 nm light incident at 40°.
Keywords :
Electron beams; Electron optics; Etching; Gratings; Lithography; Nanoscale devices; Optical coupling; Optical devices; Particle beam optics; Silicon on insulator technology;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247761
