Title :
Smart PM automatic control system
Author :
Chang, Cheng-Sheng ; Lo, Hsi-Lo ; Pan, Cheng-Chung ; Wu, De-Lung
Author_Institution :
Rexchip Semicond. Corp., Houli, Taiwan
Abstract :
This paper focus on the tool preventive maintenance (PM) control automatically. We develop a system called Smart PM automatic control system. This system will help us to forecast PM exactly and arrange PM schedule in advance. It can also control suitable Queue-time WIP before PM, and then auto check tools before tools recovery. The system has implemented in our 300mm Fab, it help us to improve the productivity against PM on the production. The tool average idle time after recovering has reduced from 0.3 hour to 0.01 hour. And the count of lot over queue time due to PM has reduced from 10 to less than 1 per week.
Keywords :
computer aided production planning; job shop scheduling; preventive maintenance; production control; productivity; work in progress; PM schedule; preventive maintenance control; productivity; queue-time WIP; smart PM automatic control system; work in process; Maintenance engineering; Manuals; Production; Radio frequency; Schedules; preventive maintenance; real time dispatcher;
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4577-0392-8
Electronic_ISBN :
1523-553X
